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Edwards SCU-350分子泵控制器

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产品名称: Edwards SCU-350分子泵控制器
产品型号: YT21Z0Z01
产品展商: Edwards
产品文档: 无相关文档

简单介绍


Edwards SCU-350分子泵控制器  的详细介绍

Edwards SCU-350 Turbomolecular Vacuum Pump Control Unit - NEW

The Edwards new SCU-350 control unit is a EU-RoHS compliant controller for small sized turbo pumps. It is fully compatible with the current control unit models, but has an improved vibration property at low frequency range. It also has lower input voltage, which contributes to a reduction in electric capacity and tool power consumption. The SCU-350 has improved noise immunity and is equipped with universal voltage function for operation with supply voltage from 100-240 VAC without switching.

  • Better vibration property
  • No peak vibration movement across all frequencies
  • Compact design
  • Smallest size control unit in its class
  • Energy saving
  • Low input power translates into low power consumption on the tool
      Universal voltage for range 100-240VAC.
      No switching required between 100-120V and 200-240V. 
      Minimizes number of back up units stocked
  • Full compatibility with existing control unit
  • Same size
      Same cables can be used
      No change to pumping performance
  • Better noise immunity
  • Electrostatic discharge withstand voltage up to 30kV with standard specification
      Applicable for ion implant tools
  • Compliant with international standards

CE Marked, UL marked, SEMI-S2 and EU-RoHS Compliant

Magnetic bearing control system Digital control
Input voltage 100 - 120 V / 200 - 240 VAC
Power consumption (start up) Max 350 VA
Power consumption (continuous) Max 150 VA
Input frequency 50/60 ±2 Hz
Leak current 3.5 mA
Main breaker rated current 5 A
Motor drive system 3 phase DC
Allowable ambient temperature 0 to 40°C (32 to 104°F)
Weight 8 kg
Panel display LCD
Edwards SCU-350 Turbomolecular Vacuum Pump Control Unit - NEW

YT21Z0Z01 / YT21-Z0-Z01  SCU-350
YT21ZEZC0 / YT21-ZE-ZC0  SCU-350  RS232 
YT21ZCZC0 / YT21-ZC-ZC0  SCU-350A  ABS
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