产品资料

Edwards STPH 451C涡轮分子泵

如果您对该产品感兴趣的话,可以
产品名称: Edwards STPH 451C涡轮分子泵
产品型号: B71901001
产品展商: Edwards
产品文档: 无相关文档

简单介绍


Edwards STPH 451C涡轮分子泵  的详细介绍

Edwards STPH 451C Turbomolecular Vacuum Pump - NEW

Edwards high performance STPH451C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH451C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Higher gas throughput
  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

5 Axis Magnetic Suspension System

  • Zero contamination
  • Low maintenance
  • Any orientation operation
Inlet flange ISO-160K
Outlet port KF-40
Purge port KF-10
Water cooling fitting PT1/4
Pumping speed
    N2 450 l/s
    H2 300 l/s
Compression ratio
    N2 > 108
    H2 103
Ultimate pressure w/ bake out heating     10-7 Pa (10-9 Torr)
Max. continuous outlet pressure 665 Pa (5 Torr)
Max. nitrogen throughput 2,500 sccm
Rated speed 48,000 rpm
Starting time 4 min
Max inlet flange temperature 120°C
Input voltage 100 to 120
Power consumption 0.6 kVA
Weight 15 kg 
Edwards STPH451C Turbomolecular Vacuum Pump - NEW

P/N B719-01-001 / B71901001  STPH451C  ISO-160K
P/N PT34-0Z-005 / PT340Z005  STPH451C  DN 160 CF
P/N YT34-16-007 / YT3416007  STPH451CV  ISO-160F TMS
    YT34-16-006 / YT3416006  STPH451CV  DN 160 CF TMS
产品留言
标题
联系人
联系电话
内容
验证码
点击换一张
注：1.可以使用快捷键Alt+S或Ctrl+Enter发送信息!
2.如有必要,请您留下您的详细联系方式!

沪公网安备 31011702004251号