Edwards STPXA4503C磁悬浮分子泵

Edwards STP-XA4503C Turbomolecular Vacuum Pump - NEW

The STP-XA4503C magnetic bearing turbomolecular pump has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases.

This pump is based on a new design, offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition.

It has been designed to handle light and harsh duty applications, such as etch, implant, lithography and FPD processes.

Advanced Rotor Design

• Increased Argon performance
• Highest pumping speed in its class
• Wide process window
• Higher throughput at lower pressure
• Maintenance free
• Harsh process compatible

5-Axis Magnetic Suspension System

• Zero contamination
• Low vibration
• High reliability

Optimized Temperature Distribution

• Low deposition
• Built-in cooling mechanism
• Higher gas throughput
• Increased operating life

Certifications

• Conforms to international safety standards
• UL listed, CE marked and SEMI® S2 compliant

Edwards STP-XA4503C Turbomolecular Vacuum Pump - NEW
P/N YT67-0Z-040 / YT670Z040  STP-XA4503C  ISO-320F