Edwards STPA2203C 磁悬浮分子泵

Edwards STPA2203C Turbomolecular Vacuum Pump - NEW

Edwards STPA2203C is a new turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A new half rack controller gives additional space savings and incorporates d.c. drive technology for battery-free operation. The STPA2203C has been approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Design

• Higher gas throughput
• Maximized process flexibility

5 Axis Magnetic Suspension System

• Zero contamination
• Low maintenance

Corrosion Resistant

• Harsh process compatible
• Increased life

Compact Design

• Small footprint
• Half rack controller

Advanced Controller Design

• Auto tuning
• Self diagnostic functions
• DC motor drive
• Battery-free operation

Edwards STPA2203C Turbomolecular Vacuum Pump - NEW

P/N YT4V-0Z-002 / YT4V0Z002  STPA2203C  ISO-250F
P/N YT4V-0Z-003 / YT4V0Z003  STPA2203C  DN 250 CF
P/N YT4V-66-001 / YT4V66001  STPA2203CV  ISO-250F TMS
    YT4V-66-002 / YT4V66002  STPA2203CV  DN 250 CF TMS