Edwards STPA1603C磁悬浮高真空分子泵

Edwards STPA1603C Turbomolecular Vacuum Pump - NEW

The small and powerful Edwards STPA1603C turbomolecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance. The STPA1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.

Advanced Rotor Design

• Increased performance
• Higher gas throughput
• High reliability
• Maintenance free
• Harsh process compatible

5 Axis Magnetic Suspension System

• Zero contamination
• Low vibration

Corrosion Resistant

• Harsh process compatible
• Increased life

Compact Design

• Small footprint
• Half rack controller

Advanced Controller Design

• Auto tuning
• Self diagnostic functions
• DC motor drive
• Battery-free operation

Edwards STPA1603C Turbomolecular Vacuum Pump - NEW

P/N B751-00-010 / B75100010  STPA1603C  ISO-200F
P/N B751-00-100 / B75100100  STPA1603C  DN 200 CF
P/N YT46-16-003 / YT4616003  STPA1603CV  VG200 TMS
    YT46-16-004 / YT4616004  STPA1603CV  ISO-200F TMS
    YT46-16-030 / YT4616030  STPA1603CV  ISO-250F TMS
    YT46-16-004 / YT4616004  STPA1603CV  ISO-200F TMS
    YT46-16-005 / YT4616005  STPA1603CV  DN 200 CF TMS
    YT46-0Z-000 / YT460Z000  STPA1603C  VG200 
    YT46-B0-060 / YT46B0060  STPA1603C  ISO-200F
    YT46-0Z-030 / YT460Z030  STPA1603C  ISO-250F