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Edwards STP1003/C高真空涡轮分子泵

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产品名称: Edwards STP1003/C高真空涡轮分子泵
产品型号: YT390Z001
产品展商: Edwards
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Edwards STP1003/C高真空涡轮分子泵  的详细介绍

Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW

Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the most advanced of semiconductor applications. Edwards’s rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible (C version)
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller
Inlet flange ISO-200F
Outlet port KF-40
Purge port KF-10
Water cooling fitting PT1/4
Pumping speed
    N2 1,000 l/s
    H2 800 l/s
Compression ratio
    N2 > 108
    H2 105
Ultimate pressure w/ bake out heating     10-7 Pa (10-9 Torr)
Max. continuous outlet pressure 13 Pa (0.1 Torr)
Max. nitrogen throughput 2,500 sccm
Rated speed 35,000 rpm
Starting time 6 min
Max inlet flange temperature 120°C
Input voltage 100 to 120
Power consumption 0.8 kVA
Weight 31 kg 
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW

P/N YT39-0Z-001 / YT390Z001  STP1003  ISO-200F
P/N YT39-B0-010 / YT39B0010  STP1003  DN 200 CF
P/N YT39-B0-130 / YT39B0130  STP1003C  ISO-200F
    PT39-AZ-003 / PT39AZ003  STP1003C  DN 200 CF

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