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Edwards STP 603 / C磁悬浮分子泵

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产品名称: Edwards STP 603 / C磁悬浮分子泵
产品型号: YT39B0030
产品展商: Edwards
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Edwards STP 603 / C磁悬浮分子泵  的详细介绍

Edwards STP603 / C Turbomolecular Vacuum Pump - NEW

Edwards STP603 is a new turbomolecular pump for use in the most advanced semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller
Inlet flange ISO-160F
Pumping speed
    N2 650 l/s
    H2 550 l/s
Compression ratio
    N2 > 108
    H2 > 105
Ultimate pressure w/ bake out heating     10-7 Pa (10-9 Torr)
Max. continuous outlet pressure 13 Pa (10-10 Torr)
Max. continuous outlet pressure 13 Pa (0.1 Torr)
Rated speed 35,000 rpm
Starting time 6 min
Max inlet flange temperature 120°C
Input voltage 100 to 120
Power consumption 0.8 kVA
Weight 31 kg 
Edwards STP603 / C Turbomolecular Vacuum Pump - NEW

P/N YT39-B0-030 / YT39B0030  STP603  ISO-160F
P/N YT39-0Z-005 / YT390Z005  STP603  DN 160 CF
P/N YT39-AZ-002 / YT39AZ002  STP603C  DN 160 CF
    YT39-AZ-000 / YT39AZ000  STP603C  VG-150
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