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Edwards iH600半导体真空泵

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产品名称: Edwards iH600半导体真空泵
产品型号: A59020957
产品展商: Edwards
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简单介绍


Edwards iH600半导体真空泵  的详细介绍

Edwards iH600 Semiconductor Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.


 

Peak speed

600 m3h-1
353 cfm
10,000 lmin-1
Ultimate vacuum 7 x 10-4 mbar
5.3 x 10-4 Torr
0.07 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO100
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     240 lh-1
4 lmin-1
Weight 415 kg
Power input at ultimate 3.4 kW
Rated motor power 6.1 kW
Oil capacity 1.43 l 

Edwards iH600 Semiconductor Dry Vacuum Pump - NEW

A59020908 / A590-20-908  iH600  MK5 460V 60Hz three-phase
A59020945 / A590-20-945  iH600  MK5 200/208V 50/60Hz 3-phase
A59020946 / A590-20-946  iH600  MK5 380/415V 50/60Hz 3-phase
A59020957 / A590-20-957  iH600  MK5 230V 60Hz 3-phase


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