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Edwards EPX500L - NEW干式真空泵

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产品名称: Edwards EPX500L - NEW干式真空泵
产品型号: A41951314
产品展商: Edwards
产品文档: 无相关文档

简单介绍


Edwards EPX500L - NEW干式真空泵  的详细介绍

Edwards EPX500L 208V Semiconductor Dry Vacuum Pump - NEW

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of < 7 x 10-7 Torr. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.

Peak Speed 500 m3h-1 / 295 ft3min-1 / 8,338 lmin-1
Ultimate Vacuum < 1 x 10-6 mbar / < 7 x 10-7 Torr / < 1 x 10-4 Pa
Warm up time (to nominal performance) 30 min
Inlet Flange ISO160
Outlet flange NW25
Noise < 59 dB(A)
Minimum cooling water flow rate 2 lmin-1
Cooling water temperature 15 - 35°C
Nitrogen supply interface 1/4 in (6.5 mm) tube
Nitrogen supply pressure 3 x 105 - 7 x 105 pa
Minimum nitrogen purity 99.95%
Electrical supply 200/208 V, 50/60 Hz 3-phase
Power at ultimate 1.4 kW
Rated motor power 3.0 kW
TIM C3
Weight 45.2 kg
Edwards EPX500L 208V Semiconductor Dry Vacuum Pump - NEW

A41951212 / A419-51-212  EPX500L  208V SPI TIM 3/8 water connector
A41951214 / A419-51-214  EPX500L  400V SPI TIM 3/8 water connectors
A41951222 / A419-51-222  EPX500L  208V SPI TIM 1/4 water connector
A41951314 / A419-51-314  EPX500L  400V E73 TIM 3/8 water connectors
A41951514 / A419-51-514  EPX500L  400V LAM TIM 3/8 water connectors
A41951704 / A419-51-704  EPX500L  400V MCM TIM No water connectors
A41951712 / A419-51-712  EPX500L  208V MCM TIM 3/8 water connector
A41951714 / A419-51-714  EPX500L  400V MCM TIM 3/8 water connectors
A41951112 / A419-51-112  EPX500L  208V C3 TIM 3/8 water connector
A41951002 / A419-51-002  EPX500L  200V
A41951004 / A419-51-004  EPX500L  400V
A41951014 / A419-51-014  EPX500L  400V SPI TIM 3/8 water connectors
OBSOLETED
 
A40902977 / A409-02-977  IPX100
A40902973 / A409-02-973  IPX100
A40904977 / A409-04-977  IPX100A
A40904973 / A409-04-973  IPX100A
A40924977 / A409-24-977  IPX180A
A40924973 / A409-24-973  IPX180A
A40914977 / A409-14-977  IPX500A
A40914973 / A409-14-973  IPX500A

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