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Edwards iH80干式真空泵

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产品名称: Edwards iH80干式真空泵
产品型号: A59000945
产品展商: Edwards
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Edwards iH80干式真空泵  的详细介绍

Edwards iH80 Semiconductor Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.


Peak speed 103 m3h-1
61 cfm
1,717 lmin-1
Ultimate vacuum 1 x 10-2 mbar
7.5 x 10-3 Torr
1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO63
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     120 lh-1
2 lmin-1
Weight 240 kg
Power input at ultimate 2.7 kW
Rated motor power 3.5 kW
Oil capacity 0.7 l 
Edwards iH80 Semiconductor Dry Vacuum Pump - NEW

A59000908 / A590-00-908  iH80  MK5 460V 60Hz three-phase
A59000945 / A590-00-945  iH80  MK5 200/208V 50/60Hz 3-phase
A59000946 / A590-00-946  iH80  MK5 380/415V 50Hz 3-phase
A59000957 / A590-00-957  iH80  MK5 230V 60Hz 3-phase

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