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Edwards iGX100MTI半导体真空泵

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产品名称: Edwards iGX100MTI半导体真空泵
产品型号: A54612959
产品展商: Edwards
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Edwards iGX100MTI半导体真空泵  的详细介绍

Edwards iGX100MTI Semiconductor Dry Vacuum Pump - NEW

The iGX dry vacuum pump series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.

iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

Peak speed 105 m3h-1 / 62 cfm
Ultimate pressure 5.00E-03 mbar / 3.75E-03 Torr
Power at 700 Torr exhaust
Ultimate 1 kW
AUC (Active Utility Controller)     0.05 kW
Water inlet 1 slm
Nitrogen 4 or 14 slm
Footprint excluding exhaust 0.20 m2
Weight 120 kg
Inlet connectiom ISO63
Outlet connection NW25
Noise at ultimate < 55 dB(A)

A54648958 / A546-48-958  iGX100MTI  200-230V 50/60 Hz


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