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Edwards iH1800HTX干式爪型真空泵

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产品名称: Edwards iH1800HTX干式爪型真空泵
产品型号: A59062945
产品展商: Edwards
产品文档: 无相关文档

简单介绍


Edwards iH1800HTX干式爪型真空泵  的详细介绍

Edwards iH1800HTX Semiconductor Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH1800HTX is specifically designed for processes such as 300 mm LPCVD Nitride, where higher operating temperatures are required to prevent process gas condensation.


Peak Speed 1800 m3h-1
  1060 cfm
  30000 l min-1
Ultimate Vacuum 1 x 10-3 mbar
  7.5 x 10-4 Torr
  0.1 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet Connection ISO160
Outlet Connection NW40
Typical cooling water flow at 15 psi pressure drop 240 l h-1
  4 l min-1
Weight 502 kg
Power input at ultimate 4.1 kW
Rated motor power 7.0 kW
Oil Capacity 1.6 l


All figures are typical without gas ballast.

Specifications 


Edwards iH1800HTX Semiconductor Dry Vacuum Pump - NEW

A59040908 / A590-40-908  iH1800  460V 60Hz three-phase
A59040945 / A590-40-945  iH1800  200/208V 60Hz 3-phase
A59040946 / A590-40-946  iH1800  380/415V 50Hz 3-phase
A59040957 / A590-40-957  iH1800  230V 60Hz 3-phase
A59060945 / A590-60-945  iH1800  200/208V 50Hz 3-phase
A59042908 / A590-42-908  iH1800HTX  460V 60Hz 3-phase
A59042945 / A590-42-945  iH1800HTX  200/208V 50/60Hz 3-phase
A59042946 / A590-42-946  iH1800HTX  380/415V 50Hz 3-phase
A59042957 / A590-42-957  iH1800HTX  230V 60Hz 3-phase
A59062945 / A590-62-945  iH1800HTX  200/208V 50/60Hz 3-phase




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